《vacuumpump真空泵》PPT课件.ppt
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1、Unit.Vacuum Pumps05/10/2004Title2Vacuum pumps be concerned with 与相关pumping mechanism:lowering the molecules number compression-expansion:piston pump(活塞)liquid ring pump(液环)rotary pump Roots pump Drag by viscosity(黏性):vapor ejecting pump Drag by diffusion effect:vapor diffusion pump molecular drag:mo
2、lecular pump ionization effect:ion pump physical/chemical sorption pump:sorption pump,cryopump(低温),gettering(吸气)pump2.1 Principles of pumping05/10/2004Title3A sort of pumpI.Gas transfer pumpsremovegasparticlesfromthesystem.Therearerotaryvanepump,turbomolecularpumpanddiffusionpumpingastransferpumps.I
3、I.Entrapment pumpsinwhichgasparticlesthathaveenteredfromthesystemaretrappedeitherchemicallyorphysicallywithinthepump.Therearesputterionpump,sublimationpumpandsorptionpumpinentrapmentpumps.Vacuum pumps can be classified as either gas transfer pumps or entrapment pumps,according to their overall pumpi
4、ng mechanism.05/10/2004Title4VACUUM PUMPING METHODSSliding VaneRotary PumpMolecularDrag PumpTurbomolecularPumpFluid EntrainmentPumpVACUUM PUMPS(METHODS)ReciprocatingDisplacement PumpGas TransferVacuum PumpDragPumpEntrapmentVacuum PumpPositive DisplacementVacuum PumpKineticVacuum PumpRotaryPumpDiaphr
5、agmPumpPistonPumpLiquid RingPumpRotaryPiston PumpRotaryPlunger PumpRootsPumpMultiple VaneRotary PumpDryPumpAdsorptionPumpCryopumpGetterPumpGetter IonPumpSputter IonPumpEvaporationIon PumpBulk GetterPumpCold TrapIon TransferPumpGaseous Ring PumpTurbinePumpAxial FlowPumpRadial FlowPumpEjectorPumpLiqui
6、d JetPumpGas JetPumpVapor JetPumpDiffusionPumpDiffusionEjector PumpSelf PurifyingDiffusion PumpFractionatingDiffusion PumpCondenserSublimationPump05/10/2004Title5PUMP OPERATING RANGES10-1210-1010-810-610-410-2110+2P(mbar)RoughVacuumHighVacuumUltraHighVacuumVenturiPumpRotaryVaneMechanicalPumpRotaryPi
7、stonMechanicalPumpSorptionPumpDryMechanicalPumpBlower/BoosterPumpHighVac.PumpsUltra-HighVac.Pumps05/10/2004Title62.2 parameter and classification ultimate pressure lowest pressure at its inlet leakage vapour pressure pressure range (useful pumping action)adjacent 相近的 pumping speed(function of pressu
8、re)The pumping speed is the volumetric flow through the pumps intake port.specific exhaust pressure selectivity 抽气选择性 composition of the residual gas from my point of view(viewpoint)in my opinion roughing pump:pumping to acceptable operating pressure backing pump:maintance of required low pressure a
9、t the out let of another pump outlet/inlet operating pump:启动压强 sub-:submicron,subsidiary company,subsequent immobilize 固定不动 mobile phone ionization电离 sorption 吸附05/10/2004Title7Pumping Speed10-1010-310-1Pumping Speed(Air)1234Inlet Pressure(Torr)Critical Point1.Compression Ratio Limit2.Constant Speed
10、3.Constant Q(Overload)4.Mechanical Pump Effect05/10/2004Title8SelectivityMolecular pumpSorption pump05/10/2004Title9RotaryvanepumpOilsealedrotaryvanepumpsaresuitableforthedirectproductionofroughandmediumvacuum.Theyarealsousedextensivelytobackrootsvacuum,turbomolecularanddiffusionpumps.Four stages in
11、 the cycle of a rotary vane pumpThemechanism,whichislubricatedbyoil,consistsofahousingwithacylindricalboreintowhichisfittedarotor.Therotorturns,thetipsofthebladesareincontactwiththestatorwallatalltimes.Fourstagesinonerevolutionoftherotorareinduction,isolation,compressionandexhaustphases.05/10/2004Ti
12、tle10Mineraloilsarethemostcommonlyusedfluidsforrotarypumps.Ingeneral,oilsavailablefromagarageservicestationorstoredonothaveasuitablelowvapourpressureandnoneexhibittheservicelifeorlowlevelofbackmigrationrequiredformostprocess.Mineraloilsofferedbyvacuumpumpmanufacturesandothersuppliershavebeendistille
13、dtoremovevolatilecomponents.The cross section of rotary vane pumpSchematic of a rotary vane pumpRotary vane pump05/10/2004Title11CrosssectionofrotarypumpImage of rotary pump and partsRotaryvanepump05/10/2004Title1205/10/2004Title13Two stage rotary pump05/10/2004Title14constitute组成statorn.定子,固定片eccen
14、tricrotorn.偏心转子vane/blade:阀片diametralslotn.缝,狭槽cylindertubulationn.管dustfilter滤网arresterplate:锁定平板sheetofneoprene n.丁晴橡胶垫(条)hinge 铰链 backing sleet 挡板 driving shaft 驱动轴 clearance 间隙 sliding fit:滑动配合 spring 弹簧 rotating-vane pump/rotary pump05/10/2004Title15 rounded end submerge top seal 顶端密封 exhaust v
15、alve 排气阀 intake 吸入量 cavity 空腔 volume rate pump displacement:排气量 abrasive material:腐蚀性材料 dead volume:余隙容积,有害空间 re-又,再 discharge 排出 compression ratio:压缩比the main function of the oil:lubrication sealing filling the dead volume permanent gas total/partial gas Mcleod/pirani gauge reading 读数 Parallel/seri
16、es connection 并/串连dead volume05/10/2004Title16 Pumping speed curves fall off 下降 noticeable obvious gas ballast 气镇 condensible adj.可压缩(凝缩)的 contaminate vt.污染 evaporate-condense05/10/2004Title17Gas ballast1)Pump is connected to the vessel,whichis already almost empty of air(70 mbar)it must thus transp
17、ort mostly vapor particles2)Pump chamber is separated from the vessel compression begins3)Content of pump chamber is already so far compressed that the vapor condensesto form droplets overpressure is not yetReached4)Residual air only now produces the required overpressure and opens the discharge val
18、ve,but the vapor has already condensed and the droplets are precipitated inthe pump.Without gas ballast05/10/2004Title18Gas ballast1)Pump is connected to the vessel,which is already almost empty of air(70 mbar)it must thus transport mostly vapor particles2)Pump chamber is separated from the vessel n
19、ow the gas ballast valve,through which the pump chamber is filled with additional air from outside,opens this additional air is called gas ballast3)Discharge valve is pressed open,and particles of vapor and gas are pushed out the overpressure required for this to occur is reached very early because
20、of the supplementary gas ballast air,as at the beginning the entire pumping process condensation cannot occur4)The pump discharges further air and vaporWith gas ballast05/10/2004Title19RootspumpTheRootspumpconsistoftwodouble-lobeimpellers.Thesearerotatedinoppositewithinthepumphousing.Thedirectionsof
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